Life cycle assessment in semiconductor foundry

Ahmad, Abdul Hamid (2007) Life cycle assessment in semiconductor foundry. [USQ Project]

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Abstract

[Abstract] : The environmental impact related to the use and manufacturing phases of the semiconductor chips could be potentially very strong due to the high technological level of process, the amount of energy and the special materials used for their realization. As society becomes more affluent, the demand for ubiquitous devices such as cell phone, laptops, digital cameras and other accessories becomes an integral part of modern life. Semiconductors are the essential component of these products but are often overlook in terms of their environmental impacts.

LCA is a useful tool to quantify the environmental impact. LCA is made up of four key components; goal and scope definition, life cycle inventory analysis, life cycle impact assessment and life cycle interpretation.

This project will identify the scale of environmental impacts in the semiconductor manufacturing of a CMOS wafer during its manufacturing phase based on the Life Cycle
Assessment methodology.

The functional unit of the device under study is a CMOS wafer. The data collected is a gate to gate inventory that has been obtained from detailed technological analysis, from information obtained directly from company database and material suppliers. Simapro7 is used to carry out the impact assessment.

The impact assessment will identify the environmental hotspots. With this, suggestions and recommendations are made on the manufacturing process and materials used for
environmental sustainability.

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Item Type:	USQ Project
Refereed:	No
Item Status:	Live Archive
Faculty/School / Institute/Centre:	Historic - Faculty of Engineering and Surveying - Department of Electrical, Electronic and Computer Engineering (Up to 30 Jun 2013)
Date Deposited:	29 Feb 2008 01:35
Last Modified:	02 Jul 2013 22:59
Uncontrolled Keywords:	foundary; environment; semiconductors
Fields of Research (2008):	05 Environmental Sciences > 0502 Environmental Science and Management > 050204 Environmental Impact Assessment 09 Engineering > 0907 Environmental Engineering > 090703 Environmental Technologies 09 Engineering > 0906 Electrical and Electronic Engineering > 090608 Renewable Power and Energy Systems Engineering (excl. Solar Cells)
Fields of Research (2020):	41 ENVIRONMENTAL SCIENCES > 4104 Environmental management > 410402 Environmental assessment and monitoring 40 ENGINEERING > 4011 Environmental engineering > 401102 Environmentally sustainable engineering 40 ENGINEERING > 4008 Electrical engineering > 400803 Electrical energy generation (incl. renewables, excl. photovoltaics)
URI:	https://sear.unisq.edu.au/id/eprint/3939

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